Introductory MEMS Fabrication and Applications
Introductory MEMS Fabrication and Applications by Thomas M. Adams, published by Springer US on September 7, 2014, is a comprehensive resource designed for advanced undergraduate and graduate students. This edition spans 444 pages and provides a practical introduction to Micro-Electro-Mechanical Systems (MEMS), covering essential fabrication techniques and the devices that result from these processes.
Readers will find a structured approach to understanding MEMS, with Part I detailing common fabrication techniques and Part II focusing on MEMS transducers, including their principles of operation and modeling. The book also explores commercialized MEMS devices and microfluidics, supplemented by field-tested laboratory exercises that enhance learning about microfabrication processes. Each chapter concludes with references, suggested readings, review questions, and homework problems, making it a valuable educational tool in the fields of technology, engineering, and materials science.
Official synopsis Publisher
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.
Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.
Publisher
Topics
FAQ
What is “Introductory MEMS Fabrication and Applications” about?
Who is the author of “Introductory MEMS Fabrication and Applications”?
When was “Introductory MEMS Fabrication and Applications” published?
What is the ISBN for “Introductory MEMS Fabrication and Applications”?
What are the book details (language, pages, edition)?
