MEMS Linear and Nonlinear Statics and Dynamics
MEMS Linear and Nonlinear Statics and Dynamics by Mohammad I. Younis, published by Springer US on June 27, 2011, is a comprehensive resource for MEMS designers. This 456-page book presents essential analytical and computational tools necessary for modeling and simulating various MEMS devices, structures, and phenomena, focusing on both linear and nonlinear aspects.
Readers will find an in-depth analysis of common static and dynamic phenomena encountered in MEMS engineering. The book covers nonlinear modeling approaches, addressing issues such as electrostatic forces and large deflections. It includes practical examples of MEMS devices requiring static or dynamic modeling, along with code for programs in Matlab, Mathematica, and ANSYS to aid in simulating MEMS behavior. Additionally, real-world problems related to the dynamics of electrostatically actuated devices are discussed, making this volume a valuable asset for professionals in the fields of technology, engineering, and nanotechnology.
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MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also:
- Includes examples of numerous MEMS devices and structures that require static or dynamic modeling
- Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures
- Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces
MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.
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